重量 | 6.6 |
---|---|
灵敏度 | 2*10-4, <200 |
介质温度 | 70℃(max.) |
测量精度 | 10-4/10-6 |
品牌 | 斯坦福Stamford |
型号 | RGA200 |
残余气体分析仪(RGA)划分为RGA100、RGA200、RGA300amu三种型号,其优异的性能和价值是真空分析仪的**产品。并且SRS提供的残余气体分析仪的价格不到同类产品的一半,每一个RGA系统都由一个四级杆探针和电子控制单元组成。实时分析的windows软件包可以更方便的用于数据采集和分析,并可进行远程控制。
残余气体分析仪具体性能参数如下:
型号
质谱范围:
RGA100:1 to 100 amu
RGA200:1 to 200 amu
RGA300:1 to 300 amu
质朴滤波器类型:Quadrupole
探测器类型:Faraday cup (FC), standard Electron multiplier (EM), optional
分辨率:Better than 0.5 amu @ 10 % peak height. Adjustable to constantpeak throughout the mass range.
灵敏度(A/Torr) :2*10-4(FC), <200 (EM).
探测极限:5*10-11 Torr (FC), 5 *10-14 Torr (EM)
测试范围:10-4 Torr to UHV (FC) 10-6 Torr to UHV (EM)
操作温度:70℃(max.)
烘烤温度:300℃(withoutECU)
离子发生器
结构:Open ion source, cylindrical symmetry, electron impact ionization
材料:SS304 construction
灯丝:Thoriated iridium (dual) with firmware protection. Built-in 1 to10 W degas ramp-up. Field replaceable.
电子能量:25 to 105 V, programmable
离子能量:8 or 12 V, programmable
焦点电压:0 to 150 V, programmable
电子输出电流:0 to 3.5 mA, programmable
规格
探针尺寸:8.75” from flange face to top of ionizer
探针孔径:2.0”
探针安装法兰:2.75”CF
Minimum tube I.D.:1.375”
ECU尺寸:3.1”*4.1” * 9.1” (WHD). Easily separated from the probe for**out.
LED指示灯:Power ON/OFF, filament ON/OFF, degas ON/OFF, electron multiplier ON/OFF,RS-& 232 Busy, Error, Overpressure, Burnt Filament
预热时间:Mass stability ±0.1 amu after 30 minutes
电脑接口:RS-232C, 28,800 baud with highlevel command set
软件:Windows based application
电源要求:24 VDC @ 2.5 amps, male DB9 connector, optional built-in powermodule for AC line operation